Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulsemagnetron sputtering (HIPIMS) and DC pulse sputtering

MinSuKANG,Tie-gangWANG,JungHoSHIN,RomanNOWAK,KwangHoKIM,

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 3) : 729-734.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 3) : 729-734.
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Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulsemagnetron sputtering (HIPIMS) and DC pulse sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(Special 3): 729-734

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